In this paper, we present evaluation results of micropatterned unsublimated self-assembled electrets (SAEs) for microelectromechanical systems devices. We develop dedicated test chips, and experimental results suggest that even unsublimated Alq3 has a surface potential comparable to that of sublimed Aiq3. Both simulation and measurement results indicate that the micropatterning attenuates the surface potential of the SAEs when evaluated with Kelvin probes.